Integrated circuit package system with through semiconductor vias and method of manufacture thereof

ABSTRACT

A method of manufacture of an integrated circuit package system includes: providing a package substrate; mounting a first integrated circuit die, having through silicon vias, on the package substrate; coupling cylindrical studs to the package substrate adjacent to the first integrated circuit die; and mounting a second integrated circuit die, having through silicon vias, on the first integrated circuit die and the cylindrical studs for forming an electrical connection among the second integrated circuit die, the first integrated circuit die, the package substrate, or a combination thereof.

CROSS-REFERENCE TO RELATED APPLICATION(S)

This is a continuation of U.S. patent application Ser. No. 12/562,702filed Sep. 18, 2009, now U.S. Pat. No. 7,867,821.

TECHNICAL FIELD

The present invention relates generally to an integrated circuit packagesystem, and more particularly to a system for forming a multi-chippackage having through semiconductor vias in a stack.

BACKGROUND ART

One of the goals in the fabrication of electronic components is tominimize the size of various components. For example, it is desirablethat hand held devices such as cellular telephones and personal digitalassistants (PDAs) be as small as possible. To achieve this goal, thesemiconductor circuits that are included within the devices should be assmall as possible. One way of making these circuits smaller is to stackthe chips that carry the circuits.

A number of ways of interconnecting the chips within the stack areknown. For example, bond pads formed at the surface of each chip can bewire-bonded, either to a common substrate or to other chips in thestack. Another example is a so-called micro-bump 3D package, where eachchip includes a number of micro-bumps that are routed to a circuitboard, e.g., along an outer edge of the chip.

Yet another way of interconnecting chips within the stack is to usethrough semiconductor vias. The through semiconductor vias extendthrough the substrate thereby allowing electrical interconnectionsbetween circuits on various chips. Through semiconductor viainterconnections can provide advantages in terms of interconnect densitycompared to other technologies. However, introduction of suchinterconnects may introduce additional challenges.

The integration of chips in 3D brings-forth a number of new challengesthat need to be addressed. Hence, what is needed in the art are improvedstructures and methods of producing structures for 3D chip integration.

Thus, a need still remains for an integrated circuit package system withthrough semiconductor vias that can assist in the package shrinkingprocess. In view of the ever-increasing process of functional conversionand the consumer demand for high quality and physically small devices,it is increasingly critical that answers be found to these problems. Inview of the ever-increasing commercial competitive pressures, along withgrowing consumer expectations and the diminishing opportunities formeaningful product differentiation in the marketplace, it is criticalthat answers be found for these problems. Additionally, the need toreduce costs, improve efficiencies and performance, and meet competitivepressures adds an even greater urgency to the critical necessity forfinding answers to these problems.

Solutions to these problems have been long sought but prior developmentshave not taught or suggested any solutions and, thus, solutions to theseproblems have long eluded those skilled in the art.

DISCLOSURE OF THE INVENTION

The present invention provides a method of manufacture of an integratedcircuit package system including: providing a package substrate;mounting a first integrated circuit die, having through silicon vias, onthe package substrate; coupling cylindrical studs to the packagesubstrate adjacent to the first integrated circuit die; and mounting asecond integrated circuit die, having through silicon vias, on the firstintegrated circuit die and the cylindrical studs for forming anelectrical connection among the second integrated circuit die, the firstintegrated circuit die, the package substrate, or a combination thereof.

The present invention provides an integrated circuit package systemincluding: a package substrate; a first integrated circuit die, havingthrough silicon vias, mounted on the package substrate; cylindricalstuds coupled to the package substrate adjacent to the first integratedcircuit die; and a second integrated circuit die, having through siliconvias, mounted on the first integrated circuit die and the cylindricalstuds provides an electrical connection among the second integratedcircuit die, the first integrated circuit die, the package substrate, ora combination thereof.

Certain embodiments of the invention have other steps or elements inaddition to or in place of those mentioned above. The steps or elementwill become apparent to those skilled in the art from a reading of thefollowing detailed description when taken with reference to theaccompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view of an integrated circuit package systemin an embodiment of the present invention.

FIG. 2 is a cross-sectional view of an integrated circuit package systemin a first alternative embodiment of the present invention.

FIG. 3 is a cross-sectional view of an integrated circuit package systemin a second alternative embodiment of the present invention.

FIG. 4 is a flow chart of a method of manufacture of an integratedcircuit package system in an embodiment of the present invention.

BEST MODE FOR CARRYING OUT THE INVENTION

The following embodiments are described in sufficient detail to enablethose skilled in the art to make and use the invention. It is to beunderstood that other embodiments would be evident based on the presentdisclosure, and that system, process, or mechanical changes may be madewithout departing from the scope of the present invention.

In the following description, numerous specific details are given toprovide a thorough understanding of the invention. However, it will beapparent that the invention may be practiced without these specificdetails. In order to avoid obscuring the present invention, somewell-known circuits, system configurations, and process steps are notdisclosed in detail.

The drawings showing embodiments of the system are semi-diagrammatic andnot to scale and, particularly, some of the dimensions are for theclarity of presentation and are shown exaggerated in the drawing FIGs.Similarly, although the views in the drawings for ease of descriptiongenerally show similar orientations, this depiction in the FIGs. isarbitrary for the most part. Generally, the invention can be operated inany orientation.

Where multiple embodiments are disclosed and described, having somefeatures in common, for clarity and ease of illustration, description,and comprehension thereof, similar and like features one to another willordinarily be described with similar reference numerals. The embodimentshave been numbered first embodiment, second embodiment, etc. as a matterof descriptive convenience and are not intended to have any othersignificance or provide limitations for the present invention.

For expository purposes, the term “horizontal” as used herein is definedas a plane parallel to the plane or surface of the integrated circuitsubstrate, regardless of its orientation. The term “vertical” refers toa direction perpendicular to the horizontal as just defined. Terms, suchas “above”, “below”, “bottom”, “top”, “side” (as in “sidewall”),“higher”, “lower”, “upper”, “over”, and “under”, are defined withrespect to the horizontal plane, as shown in the figures. The term “on”means that there is direct contact among elements.

The term “processing” as used herein includes deposition of material orphotoresist, patterning, exposure, development, etching, cleaning,and/or removal of the material or photoresist as required in forming adescribed structure.

Referring now to FIG. 1, therein is shown a cross-sectional view of anintegrated circuit package system 100 in an embodiment of the presentinvention. The cross-sectional view of the integrated circuit packagesystem 100 depicts a package substrate 102 having a system side 104 anda component side 106. A component pad 108 may be coupled through thepackage substrate 102 to a system interconnect 110, which may be used toelectrically connect the integrated circuit package system 100 to thenext level system such as a printed circuit board, not shown.

A first integrated circuit die 112 having an active side contact 114 anda through silicon via 116 may be mounted on the component side 106. Theactive side contact 114 can be formed on and extend above the throughsilicon via 116. The through silicon via 116 makes the interface signalsfrom the active side contact 114 available on the back side of the firstintegrated circuit die 112. The through silicon via 116 may be coupledto the component pad 108 by a chip interconnect 118, such as a solderbump, solder ball, solder column, or stud bump. The position of theactive side contact 114 is an example only and the active side of thefirst integrated circuit die 112 may be either toward or away from thecomponent side 106.

An adhesive layer 120, such as a preformed underfill material or a filmlamination type of underfill material, may be applied between the firstintegrated circuit die 112 and the component side 106 of the packagesubstrate 102. The chip interconnect 118 may be captive in the adhesivelayer 120 and applied as a unit to simplify the manufacturing process.

Cylindrical studs 122, such as solder balls of a specific size, may beapplied to the component pad 108 directly adjacent to the firstintegrated circuit die 112. The cylindrical stud 122 may be of asufficient size to extend slightly above the first integrated circuitdie 112 and be substantially the same height as the active side contact114.

A second integrated circuit die 124, having through silicon vias 126 andchip contacts 128, may be mounted on the active side contacts 114 of thefirst integrated circuit die 112. Cylindrical stud contacts 130 may becoupled between the through silicon vias 126, of the second integratedcircuit die 124, and the cylindrical stud 122 in order to form anelectrical connection between the second integrated circuit die 124 andthe system interconnect 110, without impacting the first integratedcircuit die 112.

The chip contacts 128 may be coupled to the active side or the back sideof the second integrated circuit die 124, as the through silicon vias126 provide the interface signals to both sides. A second adhesive layer132, such as a preformed underfill material or a film lamination type ofunderfill material, may be applied in a non-flow process by either beingapplied to the second integrated circuit die 124 prior to assembly or bya film lamination process during assembly.

A molded package body 134, such as an epoxy molding compound, mayoptionally be formed on the component side 106 of the package substrate102, the cylindrical studs 122, the first integrated circuit die 112,and the second integrated circuit die 124. A bond wire 136 mayoptionally couple the second integrated circuit die 124 to the componentpad 108 in order to form additional signal connections between thesystem interconnects 110 and the second integrated circuit die 124without impacting the first integrated circuit die 112.

It has been discovered that the application of the cylindrical studs 122adjacent to the first integrated circuit die 112 may provide additionalinterface capabilities for supporting a larger size of the secondintegrated circuit die 124. The attachment of a single row of thecylindrical studs 122 is an example only and multiple rows of thecylindrical studs 122 are possible. The cylindrical studs 122 may belarger than standard solder balls and their method of application, aball drop process, allows the cylindrical stud 122, of a specific size,to be precisely positioned on the package substrate 102.

Referring now to FIG. 2, therein is shown a cross-sectional view of anintegrated circuit package system 200 in a first alternative embodimentof the present invention. The cross-sectional view of the integratedcircuit package system 200 depicts the package substrate 102 having thesystem side 104 and the component side 106. The component pad 108 may becoupled through the package substrate 102 to the system interconnect110, which may be used to electrically connect the integrated circuitpackage system 200 to the next level system such as the printed circuitboard, not shown.

The first integrated circuit die 112 having the active side contact 114and the through silicon via 116 may be mounted on the component side106. The through silicon via 116 makes the interface signals from theactive side contact 114 available on the back side of the firstintegrated circuit die 112. The through silicon via 116 may be coupledto the component contact by the chip interconnect 118, such as a solderbump, solder ball, solder column, or stud bump. The position of theactive side contact 114 is an example only and the active side of thefirst integrated circuit die 112 may be either toward or away from thecomponent side 106.

The cylindrical studs 122, such as solder balls of a specific size, maybe applied to the component pad 108 directly adjacent to the firstintegrated circuit die 112. The cylindrical stud 122 may be of asufficient size to extend slightly above the first integrated circuitdie 112 and be substantially the same height as the active side contact114.

The second integrated circuit die 124, having the through silicon vias126 and the chip contacts 128, may be mounted on the active sidecontacts 114 of the first integrated circuit die 112. The cylindricalstud contacts 130 may be coupled between the through silicon vias 126,of the second integrated circuit die 124, and the cylindrical stud 122in order to form an electrical connection between the second integratedcircuit die 124 and the system interconnect 110, without impacting thefirst integrated circuit die 112.

The chip contacts 128 may be coupled to the active side or the back sideof the second integrated circuit die 124, as the through silicon vias126 provide the interface signals to both sides. The second adhesivelayer 132, such as an underfill material, may be applied in a non-flowprocess by either being applied to the second integrated circuit die 124prior to assembly or by a film lamination process.

A third integrated circuit die 202, having the through silicon vias 126,may be mounted on and electrically connected to the second integratedcircuit die 124. The chip contacts 128 of the third integrated circuitdie 202 may be coupled to the active side contacts 114 of the secondintegrated circuit die 124 in order to provide a high speed interfacebetween the two integrated circuits.

A fourth integrated circuit die 204, having the through silicon vias126, may be mounted on and electrically connected to the thirdintegrated circuit die 202. The chip contacts 128 of the fourthintegrated circuit die 204 may be coupled to the active side contacts114 of the third integrated circuit die 202 in order to provide a highspeed interface between the two integrated circuits.

The molded package body 134, such as an epoxy molding compound, mayoptionally be formed on the component side 106 of the package substrate102, the cylindrical studs 122, the first integrated circuit die 112,the second integrated circuit die 124, the third integrated circuit die202 and the fourth integrated circuit die 204. The bond wire 136 mayoptionally couple the fourth integrated circuit die 204 to the componentpad 108 in order to form additional signal connections between thesystem interconnects 110 and the fourth integrated circuit die 204without impacting the first integrated circuit die 112, the secondintegrated circuit die 124, or the third integrated circuit die 202.

It has been discovered that by providing high speed electricalinterconnects between the integrated circuit die of the presentinvention may also provide an efficient thermal path throughout thestack by thermally coupling the through silicon vias to the packagesubstrate. This allows improved reliability for the integrated circuitdie in the middle of the stack by reducing the average temperature.

Referring now to FIG. 3, therein is shown a cross-sectional view of anintegrated circuit package system 300 in a second alternative embodimentof the present invention. The cross-sectional view of the integratedcircuit package system 300 depicts the package substrate 102 having thesystem side 104 and the component side 106. The component pad 108 may becoupled through the package substrate 102 to the system interconnect110, which may be used to electrically connect the integrated circuitpackage system 200 to the next level system such as the printed circuitboard, not shown.

The first integrated circuit die 112 having the active side contact 114and the through silicon via 116 may be mounted on the component side106. The through silicon via 116 makes the interface signals from theactive side contact 114 available on the back side of the firstintegrated circuit die 112. The through silicon via 116 may be coupledto the component contact by the chip interconnect 118, such as a solderbump, solder ball, solder column, or stud bump. The position of theactive side contact 114 is an example only and the active side of thefirst integrated circuit die 112 may be either toward or away from thecomponent side 106.

The cylindrical studs 122, such as solder balls of a specific size, maybe applied to the component pad 108 directly adjacent to the firstintegrated circuit die 112. The cylindrical stud 122 may be of asufficient size to extend slightly above the first integrated circuitdie 112 and be substantially the same height as the active side contact114.

The second integrated circuit die 124, having the through silicon vias126 and the chip contacts 128, may be mounted on the active sidecontacts 114 of the first integrated circuit die 112 in an active sideto active side configuration. The cylindrical stud contacts 130 may becoupled between the through silicon vias 126, of the second integratedcircuit die 124, and the cylindrical stud 122 in order to form anelectrical connection between the second integrated circuit die 124 andthe system interconnect 110, without impacting the first integratedcircuit die 112.

The second integrated circuit die 124 may be much larger than the firstintegrated circuit die 112. In this case, additional rows of thecylindrical stud 122 may be provided to support the second integratedcircuit die 124 and provide electrical connections to the component pads108. The present invention is shown having two rows of the cylindricalstuds 122, but this is an example only and any number of rows of thecylindrical studs 122 may be applied as required.

Referring now to FIG. 4, therein is shown a flow chart of a method 400of manufacture of an integrated circuit package system in an embodimentof the present invention. The method 400 includes: providing a packagesubstrate in a block 402; mounting a first integrated circuit die,having through silicon vias, on the package substrate in a block 404;coupling cylindrical studs to the package substrate adjacent to thefirst integrated circuit die in a block 406; and mounting a secondintegrated circuit die, having through silicon vias, on the firstintegrated circuit die and the cylindrical studs for forming anelectrical connection among the second integrated circuit die, the firstintegrated circuit die, the package substrate, or a combination thereofin a block 408.

The resulting method, process, apparatus, device, product, and/or systemis straightforward, cost-effective, uncomplicated, highly versatile andeffective, can be surprisingly and unobviously implemented by adaptingknown technologies, and are thus readily suited for efficiently andeconomically manufacturing integrated circuit systems fully compatiblewith conventional manufacturing methods or processes and technologies.Another important aspect of the present invention is that it valuablysupports and services the historical trend of reducing costs,simplifying systems, and increasing performance.

These and other valuable aspects of the present invention consequentlyfurther the state of the technology to at least the next level.

While the invention has been described in conjunction with a specificbest mode, it is to be understood that many alternatives, modifications,and variations will be apparent to those skilled in the art in light ofthe aforegoing description. Accordingly, it is intended to embrace allsuch alternatives, modifications, and variations that fall within thescope of the included claims. All matters hithertofore set forth hereinor shown in the accompanying drawings are to be interpreted in anillustrative and non-limiting sense.

What is claimed is:
 1. A method of manufacture of an integrated circuitpackage system comprising: providing a package substrate; mounting afirst integrated circuit die, having through silicon vias and activeside contacts, on the package substrate, the active side contacts on andextending above the through silicon vias; coupling cylindrical studs tothe package substrate adjacent to the first integrated circuit die, thecylindrical studs the same height as the active side contacts; andmounting a second integrated circuit die, having through silicon vias,on the first integrated circuit die and the cylindrical studs forforming an electrical connection among the second integrated circuitdie, the first integrated circuit die, the package substrate, or acombination thereof.
 2. The method as claimed in claim 1 furthercomprising coupling chip contacts, on the second integrated circuit die,to the active side contacts, on the first integrated circuit die, forforming the electrical connection.
 3. The method as claimed in claim 1further comprising applying an adhesive between the first integratedcircuit die and the second integrated circuit die.
 4. The method asclaimed in claim 1 further comprising: coupling bond wires between thepackage substrate and the second integrated circuit die; and forming amolded package body on the package substrate, the first integratedcircuit die, the cylindrical studs, the second integrated circuit die,and the bond wires.
 5. A method of manufacture of an integrated circuitpackage system comprising: providing a package substrate having acomponent side and a system side; mounting a first integrated circuitdie, having through silicon vias and active side contacts, on thepackage substrate including coupling a chip interconnect between thethrough silicon via and the component side of the package substrate, theactive side contacts on and extending above the through silicon vias;coupling cylindrical studs to the package substrate adjacent to thefirst integrated circuit die including performing a ball drop processfor positioning the cylindrical studs of a specific size, thecylindrical studs the same height as the active side contacts; andmounting a second integrated circuit die, having through silicon vias,on the first integrated circuit die and the cylindrical studs forforming an electrical connection among the second integrated circuitdie, the first integrated circuit die, the package substrate, or acombination thereof including forming system contacts on the system sideof the package substrate coupled to the electrical connection.
 6. Themethod as claimed in claim 5 further comprising providing chip contactson the second integrated circuit die and to the active side contacts onthe first integrated circuit die for forming the electrical connectionincluding forming a thermal path by the through silicon vias thermallycoupled to the package substrate.
 7. The method as claimed in claim 5further comprising applying an adhesive between the first integratedcircuit die and the second integrated circuit die including applying apreformed underfill material or a film lamination type of underfillmaterial.
 8. The method as claimed in claim 5 further comprising:coupling bond wires between the package substrate and the secondintegrated circuit die including bonding to a component pad coupled tothe system contact through the package substrate; and forming a moldedpackage body on the package substrate, the first integrated circuit die,the cylindrical studs, the second integrated circuit die, and the bondwires; and wherein: coupling the cylindrical studs to the packagesubstrate includes coupling more than one row of the cylindrical studs.9. An integrated circuit package system comprising: a package substrate;a first integrated circuit die, having through silicon, vias and activeside contacts, mounted on the package substrate, the active sidecontacts on and extending above the through silicon vias; cylindricalstuds coupled to the package substrate adjacent to the first integratedcircuit die, the cylindrical studs the same height as the active sidecontacts; and a second integrated circuit die, having through siliconvias, mounted on the first integrated circuit die and the cylindricalstuds provide an electrical connection among the second integratedcircuit die, the first integrated circuit die, the package substrate, ora combination thereof.
 10. The system as claimed in claim 9 furthercomprising chip contacts, on the second integrated circuit die, coupledto the active side contacts, on the first integrated circuit die,provide the electrical connection.
 11. The system as claimed in claim 9further comprising an adhesive between the first integrated circuit dieand the second integrated circuit die.
 12. The system as claimed inclaim 9 further comprising: bond wires between the package substrate andthe second integrated circuit die; and a molded package body on thepackage substrate, the first integrated circuit die, the cylindricalstuds, the second integrated circuit die, and the bond wires.
 13. Thesystem as claimed in claim 9 further comprising: a component side and asystem side on the package substrate; a chip interconnect between thethrough silicon via, of the first integrated circuit die, and thecomponent side of the package substrate; and system contacts on thesystem side of the package substrate coupled to the electricalconnection; wherein: the cylindrical studs coupled adjacent to the firstintegrated circuit die includes a specific size cylindrical stud. 14.The system as claimed in claim 13 further comprising chip contacts onthe second integrated circuit die coupled to the active side contacts onthe first integrated circuit die to provide the electrical connectionincludes a thermal path formed by the through silicon vias thermallycoupled to the package substrate.
 15. The system as claimed in claim 13further comprising a cylindrical stud contact, attached to the throughsilicon via, on the second integrated circuit die, coupled to thecylindrical studs includes a component pad, on the component side of thepackage substrate, coupled through the cylindrical stud.
 16. The systemas claimed in claim 13 further comprising an adhesive between the firstintegrated circuit die and the second integrated circuit die includes apreformed underfill material or a film lamination type of underfillmaterial applied.
 17. The system as claimed in claim 13 furthercomprising: bond wires between the package substrate and the secondintegrated circuit die include a component pad coupled to the systemcontact through the package substrate; and a molded package body on thepackage substrate, the first integrated circuit die, the cylindricalstuds, the second integrated circuit die, and the bond wires; andwherein: the cylindrical studs coupled to the package substrate includesmore than one row of the cylindrical studs coupled to the packagesubstrate.